Issued Patents All Time
Showing 1–25 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354831 | Pattern inspection apparatus and pattern inspection method | Chosaku Noda, Tadayuki Sugimori | 2025-07-08 |
| 11417495 | Multi-charged particle beam irradiation apparatus and multi-charged particle beam inspection apparatus | Kazuhiko Inoue, Munehiro Ogasawara | 2022-08-16 |
| 11385192 | Inspection apparatus and inspection method | Riki Ogawa, Hiromu Inoue | 2022-07-12 |
| 11101103 | Multiple electron beam inspection apparatus and multiple electron beam inspection method | Riki Ogawa, Hiromu Inoue | 2021-08-24 |
| 11004193 | Inspection method and inspection apparatus | Ryoichi Hirano, Hideo Tsuchiya, Hideaki Hashimoto, Riki Ogawa | 2021-05-11 |
| 10997713 | Inspection device, inspection method, and storage medium | Takeshi Morino, Hideaki Okano, Yoshinori Honguh, Ryoichi Hirano, Hideaki Hashimoto | 2021-05-04 |
| 10984978 | Multiple electron beam inspection apparatus and multiple electron beam inspection method | Hiromu Inoue, Ryoichi Hirano, Riki Ogawa | 2021-04-20 |
| 10984525 | Pattern inspection method and pattern inspection apparatus | Ryoichi Hirano, Hideo Tsuchiya, Hideaki Hashimoto, Riki Ogawa | 2021-04-20 |
| 10846846 | Pattern inspection apparatus and pattern inspection method | Riki Ogawa, Hideaki Hashimoto, Kazuhiro Nakashima, Ryoichi Hirano, Hideo Tsuchiya +1 more | 2020-11-24 |
| 10775326 | Electron beam inspection apparatus and electron beam inspection method | Hideo Tsuchiya, Ryoichi Hirano, Hideaki Hashimoto, Riki Ogawa | 2020-09-15 |
| 10762383 | Pattern inspection apparatus and pattern inspection method | — | 2020-09-01 |
| 10712295 | Electron beam inspection apparatus and electron beam inspection method | Hideo Tsuchiya, Ryoichi Hirano, Hideaki Hashimoto, Riki Ogawa | 2020-07-14 |
| 10359468 | Thermal laser stimulation apparatus, method of thermally stimulating, and non-transitory computer readable medium | Juan Felipe Torres, Hiroya KANO, Shinichi Tatsuta | 2019-07-23 |
| 10180529 | Illumination device and light-guiding member | Hiroshi Ohno, Yuichiro Yamamoto, Mitsuaki Kato, Tomonao Takamatsu, Hiromichi Hayashihara +2 more | 2019-01-15 |
| 10041892 | Charged particle beam inspection apparatus and charged particle beam inspection method | Chosaku Noda, Riki Ogawa | 2018-08-07 |
| 9746140 | LED lighting device | Hiroshi Ohno, Mitsuaki Kato, Katsumi Hisano, Yoshinori Honguh, Yuichiro Yamamoto +3 more | 2017-08-29 |
| 9484382 | Image sensor and manufacturing method thereof | Hiroshi Ohno, Osamu Fujii, Yoshinori Honguh | 2016-11-01 |
| 9466517 | Microwave annealing apparatus and method of manufacturing a semiconductor device | Hiroshi Ohno, Tomonori Aoyama, Kiyotaka Miyano, Yoshinori Honguh | 2016-10-11 |
| 9442239 | Illuminating device | Mitsuaki Kato, Hiroshi Ohno, Katsumi Hisano, Tomonao Takamatsu, Tomoyuki Suzuki | 2016-09-13 |
| 9436001 | Light beam scanner | Masatoshi Hirono | 2016-09-06 |
| 9410689 | Lighting apparatus | Mitsuaki Kato, Hiroshi Ohno, Katsumi Hisano | 2016-08-09 |
| 9372389 | Projector and portable terminal | Masatoshi Hirono | 2016-06-21 |
| 9371967 | Lighting apparatus with heat transfer and light guiding structure | Mitsuaki Kato, Katsumi Hisano, Tomonao Takamatsu, Tomoyuki Suzuki | 2016-06-21 |
| 9281328 | Image sensor that includes a boundary region formed between a logic circuit region and an image-sensing element region and manufacturing method thereof | Hiroshi Ohno, Osamu Fujii, Yoshinori Honguh | 2016-03-08 |
| 9194568 | Lighting unit and lighting device | Takayoshi Moriyama, Junya Murata, Makoto Yamazaki, Yumi Hanyuda, Katsumi Hisano +2 more | 2015-11-24 |