Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5909030 | Pattern transfer apparatus, an operation management system thereof, and an operation management system for a semiconductor manufacture apparatus | Shusuke Yoshitake, Masamitsu Itoh | 1999-06-01 |
| 5639699 | Focused ion beam deposition using TMCTS | Hiroko Nakamura, Haruki Komano, Kazuyoshi Sugihara, Keiji Horioka, Mitsuyo Kariya +7 more | 1997-06-17 |
| 5429730 | Method of repairing defect of structure | Hiroko Nakamura, Haruki Komano, Kazuyoshi Sugihara, Keiji Horioka, Mitsuyo Kariya +7 more | 1995-07-04 |
| 5083033 | Method of depositing an insulating film and a focusing ion beam apparatus | Haruki Komano, Toshihiko Hamasaki | 1992-01-21 |
| 4712013 | Method of forming a fine pattern with a charged particle beam | Eiji Nishimura, Yoshihide Kato | 1987-12-08 |
| 4530064 | Exposure method utilizing an energy beam | Yasunobu Kawauchi | 1985-07-16 |
| 4481042 | Ion implantation method | Isao Sasaki | 1984-11-06 |
| 4457803 | Processing method using a focused ion beam | — | 1984-07-03 |
| 4430570 | Electron beam exposing apparatus | Isao Sasaki | 1984-02-07 |
| 4424448 | Electron beam apparatus | Isao Sasaki | 1984-01-03 |
| 4363995 | Electron gun | Isao Sasaki, Kazuo Tsuji | 1982-12-14 |
| 4321510 | Electron beam system | — | 1982-03-23 |
| 4199689 | Electron beam exposing method and electron beam apparatus | — | 1980-04-22 |