Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5121438 | Apparatus for inspecting articles | Yasuo Ogino, Shozo Ogata | 1992-06-09 |
| 4868395 | Electron beam lithography system for delineating a desired pattern on a target by means of electron beams | Izumi Kasahara, Yoshio Suzuki | 1989-09-19 |
| 4810095 | Laser-beam, pattern drawing/inspecting apparatus | Koji Handa | 1989-03-07 |
| 4600996 | Arrangement for inspecting circuit patterns drawn on a mask | — | 1986-07-15 |
| 4530064 | Exposure method utilizing an energy beam | Tadahiro Takigawa | 1985-07-16 |