Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4958374 | Method of checking pattern and apparatus therefor | Masakazu Tokita | 1990-09-18 |
| 4868395 | Electron beam lithography system for delineating a desired pattern on a target by means of electron beams | Yasunobu Kawauchi, Yoshio Suzuki | 1989-09-19 |
| 4743766 | Method of drawing a desired pattern on a target through exposure thereof with an electron beam | Mamoru Nakasuji | 1988-05-10 |