Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5185812 | Optical pattern inspection system | Kyoji Yamashita, Ryoichi Yoshikawa | 1993-02-09 |
| 4958374 | Method of checking pattern and apparatus therefor | Izumi Kasahara | 1990-09-18 |
| 4641252 | Electron beam drawing control system | — | 1987-02-03 |