Issued Patents All Time
Showing 1–25 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8943962 | Printing device, printing method and computer-readable storage medium storing program for executing the printing method | — | 2015-02-03 |
| 7745073 | Method for manufacturing a semiconductor device, stencil mask and method for manufacturing a the same | Kyoichi Suguro, Takeshi Shibata, Kouji Matsuo | 2010-06-29 |
| 7569838 | Electron beam inspection system and inspection method and method of manufacturing devices using the system | Kenji Watanabe, Hirosi Sobukawa, Nobuharu Noji, Tohru Satake, Shoji Yoshikawa +7 more | 2009-08-04 |
| 7459246 | Method for manufacturing a semiconductor device, stencil mask and method for manufacturing a the same | Kyoichi Suguro, Takeshi Shibata, Kouji Matsuo | 2008-12-02 |
| 7351969 | Electron beam inspection system and inspection method and method of manufacturing devices using the system | Kenji Watanabe, Hirosi Sobukawa, Nobuharu Noji, Tohru Satake, Shoji Yoshikawa +7 more | 2008-04-01 |
| 7179569 | Method for manufacturing a semiconductor device, stencil mask and method for manufacturing the same | Kyoichi Suguro, Takeshi Shibata, Kouji Matsuo | 2007-02-20 |
| 6991878 | Photomask repair method and apparatus | Shingo Kanamitsu, Takashi Hirano, Fumiaki Shigemitsu, Motosuke Miyoshi, Yuichiro Yamazaki +4 more | 2006-01-31 |
| 6992290 | Electron beam inspection system and inspection method and method of manufacturing devices using the system | Kenji Watanabe, Hirosi Sobukawa, Nobuharu Noji, Tohru Satake, Shoji Yoshikawa +7 more | 2006-01-31 |
| 6941008 | Pattern forming method | Atsushi Ando, Katsuya Okumura, Tetsuro Nakasugi | 2005-09-06 |
| 6770402 | Method for manufacturing a semiconductor device, stencil mask and method for manufacturing the same | Kyoichi Suguro, Takeshi Shibata, Kouji Matsuo | 2004-08-03 |
| 6633045 | Assembly part with wiring and for manufacturing system, method of manufacturing such assembly part, and semiconductor manufacturing system constituted using assembly part | Atsushi Ando, Katsuya Okumura | 2003-10-14 |
| 6534766 | Charged particle beam system and pattern slant observing method | Hideaki Abe, Yuichiro Yamazaki, Masahiro Inoue | 2003-03-18 |
| 6495841 | Charged beam drawing apparatus | Atsushi Ando, Shunko Magoshi, Yuichiro Yamazaki, Motosuke Miyoshi, Katsuya Okumura +1 more | 2002-12-17 |
| 6316163 | Pattern forming method | Shunko Magoshi, Masamitsu Itoh, Shinji Sato, Soichi Inoue, Katsuya Okumura | 2001-11-13 |
| 6147355 | Pattern forming method | Atsushi Ando, Katsuya Okumura, Tetsuro Nakasugi | 2000-11-14 |
| 6093931 | Pattern-forming method and lithographic system | Hiromi Niiyama, Shunko Magoshi, Atsushi Ando, Tetsuro Nakasugi, Shinji Sato +4 more | 2000-07-25 |
| 6028953 | Mask defect repair system and method which controls a dose of a particle beam | Hiroko Nakamura, Haruki Komano | 2000-02-22 |
| 5994030 | Pattern-forming method and lithographic system | Hiromi Niiyama, Shunko Magoshi, Atsushi Ando, Tetsuro Nakasugi, Shinji Sato +4 more | 1999-11-30 |
| 5989759 | Pattern forming method using alignment from latent image or base pattern on substrate | Atsushi Ando, Katsuya Okumura, Tetsuro Nakasugi | 1999-11-23 |
| 5949076 | Charged beam applying apparatus | Kenji Ohtoshi, Munehiro Ogasawara, Jun Takamatsu, Toru Koike | 1999-09-07 |
| 5843603 | Method of evaluating shaped beam of charged beam writer and method of forming pattern | Atsushi Ando, Hitoshi Sunaoshi, Hirotsugu Wada | 1998-12-01 |
| 5799104 | Mask defect repair system and method | Hiroko Nakamura, Haruki Komano | 1998-08-25 |
| 5639699 | Focused ion beam deposition using TMCTS | Hiroko Nakamura, Haruki Komano, Keiji Horioka, Mitsuyo Kariya, Soichi Inoue +7 more | 1997-06-17 |
| 5591970 | Charged beam apparatus | Haruki Komano, Akira Matsuura, Hiroko Nakamura | 1997-01-07 |
| 5539211 | Charged beam apparatus having cleaning function and method of cleaning charged beam apparatus | Kenji Ohtoshi, Itsuko Sakai, Yuichiro Yamazaki, Jun Takamatsu, Munehiro Ogasawara | 1996-07-23 |