Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490638 | Electrical power transmission system and electrical power output device | Takaaki Hashiguchi, Kenichi Fujimaki | 2016-11-08 |
| 8552594 | Noncontact power feed system, noncontact relay apparatus, noncontract power reception apparatus, and noncontact power feed method | Kenichi Fujimaki | 2013-10-08 |
| 5843603 | Method of evaluating shaped beam of charged beam writer and method of forming pattern | Atsushi Ando, Hitoshi Sunaoshi, Kazuyoshi Sugihara | 1998-12-01 |
| 5358808 | Exposure mask, method of manufacturing the same, and exposure method using the same | Akihiro Nitayama, Makoto Nakase, Kouji Hishimoto | 1994-10-25 |
| 5254417 | Reflection mask and electrically charged beam exposing apparatus using the reflection mask | — | 1993-10-19 |
| 5234780 | Exposure mask, method of manufacturing the same, and exposure method using the same | Akihiro Nitayama, Makoto Nakase, Kouji Hashimoto | 1993-08-10 |
| 5047646 | Method of correcting astigmatism of variable shaped beam | Kiyoshi Hattori, Shuichi Tamamushi, Eiji Nishimura, Naotaka Ikeda | 1991-09-10 |
| 4647782 | Charged particle beam exposure apparatus | Shunichi Sano, Mamoru Nakasuji, Ryoichi Yoshikawa | 1987-03-03 |
| 4636968 | Method of positioning a beam to a specific portion of a semiconductor wafer | Mineo Gotou | 1987-01-13 |
| 4558225 | Target body position measuring method for charged particle beam fine pattern exposure system | Mineo Gotou, Ryoichi Yoshikawa, Toru Tojo | 1985-12-10 |
| 4543512 | Electron beam exposure system | Mamoru Nakasuji | 1985-09-24 |
| 4346325 | Electron gun | Mamoru Nakasuji | 1982-08-24 |
| 4269653 | Aperture stop | Toshiaki Shinozaki | 1981-05-26 |