Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4948979 | Vacuum device for handling workpieces | Yasuo Munakata | 1990-08-14 |
| 4728797 | Method for drawing a pattern by charged beam and its apparatus | Hideo Kusakabe | 1988-03-01 |
| 4636968 | Method of positioning a beam to a specific portion of a semiconductor wafer | Hirotsugu Wada | 1987-01-13 |
| 4621371 | Method of forming by projection an integrated circuit pattern on a semiconductor wafer | Shunichi Sano | 1986-11-04 |
| 4558225 | Target body position measuring method for charged particle beam fine pattern exposure system | Ryoichi Yoshikawa, Toru Tojo, Hirotsugu Wada | 1985-12-10 |