Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794286 | Process for fabricating a metal wiring and metal contact in a semicondutor device | Hisako Aoyama, Kyoichi Suguro, Hitoshi Tamura, Hisataka Hayashi, Tomonori Aoyama +2 more | 2004-09-21 |
| 6465290 | Method of manufacturing a semiconductor device using a polymer film pattern | Kyoichi Suguro, Kouji Matsuo, Atsushi Murakoshi, Yasuhiko Sato | 2002-10-15 |
| 6093931 | Pattern-forming method and lithographic system | Kazuyoshi Sugihara, Shunko Magoshi, Atsushi Ando, Tetsuro Nakasugi, Shinji Sato +4 more | 2000-07-25 |
| 6090699 | Method of making a semiconductor device | Hisako Aoyama, Kyoichi Suguro, Hitoshi Tamura, Hisataka Hayashi, Tomonori Aoyama +2 more | 2000-07-18 |
| 6020107 | Pattern forming method through combined electron beam and light exposure utilizing multiple heat steps | Shinji Sato, Shunko Magoshi | 2000-02-01 |
| 5994030 | Pattern-forming method and lithographic system | Kazuyoshi Sugihara, Shunko Magoshi, Atsushi Ando, Tetsuro Nakasugi, Shinji Sato +4 more | 1999-11-30 |
| 5592024 | Semiconductor device having a wiring layer with a barrier layer | Hisako Aoyama, Kyoichi Suguro, Hitoshi Tamura, Hisataka Hayashi, Tomonori Aoyama +2 more | 1997-01-07 |