Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8097169 | Method for filtering chemical | Yoshihisa Kawamura, Daizo Mutoh | 2012-01-17 |
| 7862965 | Method for detecting defects which originate from chemical solution and method of manufacturing semiconductor device | Yuji Kobayashi | 2011-01-04 |
| 7075098 | Method of selecting pattern to be measured, pattern inspection method, manufacturing method of semiconductor device, program, and pattern inspection apparatus | Takahiro Ikeda, Daisuke Kawamura | 2006-07-11 |
| 6794286 | Process for fabricating a metal wiring and metal contact in a semicondutor device | Kyoichi Suguro, Hiromi Niiyama, Hitoshi Tamura, Hisataka Hayashi, Tomonori Aoyama +2 more | 2004-09-21 |
| 6090699 | Method of making a semiconductor device | Kyoichi Suguro, Hiromi Niiyama, Hitoshi Tamura, Hisataka Hayashi, Tomonori Aoyama +2 more | 2000-07-18 |
| 6060368 | Mask pattern correction method | Koji Hashimoto, Soichi Inoue, Kazuko Yamamoto, Sachiko Kobayashi | 2000-05-09 |
| 5592024 | Semiconductor device having a wiring layer with a barrier layer | Kyoichi Suguro, Hiromi Niiyama, Hitoshi Tamura, Hisataka Hayashi, Tomonori Aoyama +2 more | 1997-01-07 |