Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6991878 | Photomask repair method and apparatus | Shingo Kanamitsu, Takashi Hirano, Motosuke Miyoshi, Kazuyoshi Sugihara, Yuichiro Yamazaki +4 more | 2006-01-31 |
| 5051338 | Method and apparatus for forming resist pattern | Yoshihide Kato, Kei Kirita, Toshiaki Shinozaki, Kinya Usuda, Takashi Tsuchiya | 1991-09-24 |
| 4976810 | Method of forming pattern and apparatus for implementing the same | Satoshi Masuda, Kinya Usuda | 1990-12-11 |
| 4897337 | Method and apparatus for forming resist pattern | Yoshihide Kato, Kei Kirita, Toshiaki Shinozaki, Kinya Usuda, Takashi Tsuchiya | 1990-01-30 |
| 4840874 | Method of forming resist pattern | Kinya Usuda, Tatsuo Nomaki | 1989-06-20 |
| 4717645 | Method and apparatus for forming resist pattern | Yoshihide Kato, Kei Kirita, Toshiaki Shinozaki, Kinya Usuda, Takashi Tsuchiya | 1988-01-05 |