Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5051338 | Method and apparatus for forming resist pattern | Yoshihide Kato, Toshiaki Shinozaki, Fumiaki Shigemitsu, Kinya Usuda, Takashi Tsuchiya | 1991-09-24 |
| 4897337 | Method and apparatus for forming resist pattern | Yoshihide Kato, Toshiaki Shinozaki, Fumiaki Shigemitsu, Kinya Usuda, Takashi Tsuchiya | 1990-01-30 |
| 4717645 | Method and apparatus for forming resist pattern | Yoshihide Kato, Toshiaki Shinozaki, Fumiaki Shigemitsu, Kinya Usuda, Takashi Tsuchiya | 1988-01-05 |
| 4496843 | Method for producing metal ions | Katuo Koike | 1985-01-29 |