Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7305275 | Material supply system in semiconductor device manufacturing plant | Kunihiro Miyazaki, Soichi Nadahara, Masaji Akahori, Sota Nakagawa, Ken Nakajima | 2007-12-04 |
| 5051338 | Method and apparatus for forming resist pattern | Yoshihide Kato, Kei Kirita, Toshiaki Shinozaki, Fumiaki Shigemitsu, Takashi Tsuchiya | 1991-09-24 |
| 4976810 | Method of forming pattern and apparatus for implementing the same | Satoshi Masuda, Fumiaki Shigemitsu | 1990-12-11 |
| 4897337 | Method and apparatus for forming resist pattern | Yoshihide Kato, Kei Kirita, Toshiaki Shinozaki, Fumiaki Shigemitsu, Takashi Tsuchiya | 1990-01-30 |
| 4840874 | Method of forming resist pattern | Fumiaki Shigemitsu, Tatsuo Nomaki | 1989-06-20 |
| 4755442 | Pattern developing process and apparatus therefor | Hiroyuki Hasebe, Masayuki Suzuki, Yasuo Matsuoka, Takashi Tsuchiya | 1988-07-05 |
| 4745422 | Automatic developing apparatus | Yasuo Matsuoka, Michiro Takano | 1988-05-17 |
| 4717645 | Method and apparatus for forming resist pattern | Yoshihide Kato, Kei Kirita, Toshiaki Shinozaki, Fumiaki Shigemitsu, Takashi Tsuchiya | 1988-01-05 |