Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6801295 | Post exposure modification of critical dimensions in mask fabrication | Hiroyuki Inomata, Osamu Katada, Masa-aki Kurihara, Takeshi Ohfuji, Shiho Sasaki | 2004-10-05 |
| 6399926 | Heat-treating apparatus capable of high temperature uniformity | Osamu Katada | 2002-06-04 |
| 4745422 | Automatic developing apparatus | Yasuo Matsuoka, Kinya Usuda | 1988-05-17 |