Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6801295 | Post exposure modification of critical dimensions in mask fabrication | Hiroyuki Inomata, Masa-aki Kurihara, Takeshi Ohfuji, Shiho Sasaki, Michiro Takano | 2004-10-05 |
| 6399926 | Heat-treating apparatus capable of high temperature uniformity | Michiro Takano | 2002-06-04 |