Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6028953 | Mask defect repair system and method which controls a dose of a particle beam | Hiroko Nakamura, Kazuyoshi Sugihara | 2000-02-22 |
| 5837405 | Reticle | Yoko Tomofuji, Makoto Nakase, Takashi Sato, Hiroaki Hazama, Shinichi Ito | 1998-11-17 |
| 5807650 | Photo mask and apparatus for repairing photo mask | Hiroko Nakamura, Munehiro Ogasawara, Satoshi Masuda, Katsuya Okumura, Yoji Ogawa | 1998-09-15 |
| 5799104 | Mask defect repair system and method | Hiroko Nakamura, Kazuyoshi Sugihara | 1998-08-25 |
| 5660956 | Reticle and method of fabricating reticle | Yoko Tomofuji, Makoto Nakase, Takashi Sato, Hiroaki Hazama, Shinichi Ito | 1997-08-26 |
| 5639699 | Focused ion beam deposition using TMCTS | Hiroko Nakamura, Kazuyoshi Sugihara, Keiji Horioka, Mitsuyo Kariya, Soichi Inoue +7 more | 1997-06-17 |
| 5595844 | Method of exposing light in a method of fabricating a reticle | Yoko Tomofuji, Makoto Nakase, Takashi Sato, Hiroaki Hazama, Shinichi Ito | 1997-01-21 |
| 5591970 | Charged beam apparatus | Akira Matsuura, Hiroko Nakamura, Kazuyoshi Sugihara | 1997-01-07 |
| 5589305 | Method of fabricating a reticle | Yoko Tomofuji, Makoto Nakase, Takashi Sato, Hiroaki Hazama, Shinichi Ito | 1996-12-31 |
| 5429730 | Method of repairing defect of structure | Hiroko Nakamura, Kazuyoshi Sugihara, Keiji Horioka, Mitsuyo Kariya, Soichi Inoue +7 more | 1995-07-04 |
| 5083033 | Method of depositing an insulating film and a focusing ion beam apparatus | Toshihiko Hamasaki, Tadahiro Takigawa | 1992-01-21 |