Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472372 | Charged particle beam writing apparatus and charged particle beam writing method | Taku Yamada, Kaoru Tsuruta, Kenji Ohtoshi | 2016-10-18 |
| 9401261 | Ozone supplying apparatus, ozone supplying method, and charged particle beam drawing system | Yoshiro Yamanaka | 2016-07-26 |
| 8378576 | Ion beam generator | Einstein Noel Abarra, Yasushi Miura, Eiji FUJIYAMA, Naoyuki Suzuki, Yasushi Kamiya | 2013-02-19 |
| 8324568 | Mass spectrometer and mass spectrometry method | Yoshiro Shiokawa, Yoshiki Hirano, Megumi Nakamura, Qiang Peng, Harumi Maruyama | 2012-12-04 |
| 8309917 | Mass spectrometry and mass spectrometer used for the same | Yoshiro Shiokawa, Harumi Maruyama, Megumi Nakamura | 2012-11-13 |