Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Charged particle beam drawing apparatus and control method thereof

Charged particle beam drawing apparatus and control method thereof

US Patent 8466440 · Granted Jun 18, 2013

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Coverage calculating method, charged particle beam writing method, coverage calc2025
Multi-charged particle beam writing apparatus and multi-charged particle beam wr2025
Stamp tool, transfer device, and element array manufacturing method2025
Metallic structure for optical semiconductor device, method for producing the sa2025
Malfunction diagnosis device for leakage diagnosis device2024
Metallic structure for optical semiconductor device, method for producing the sa2024
Vane pump2024
Multi-beam writing method and multi-beam writing apparatus2024
Human body static electricity control device and human body static electricity c2023
Substrate processing apparatus and substrate processing method2023
Malfunction diagnostic device for leakage diagnostic device2023
Multiple charged particle beam writing apparatus and multiple charged particle b2023