Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8461555 | Charged particle beam writing method and charged particle beam writing apparatus | — | 2013-06-11 |
| 7705327 | Beam shot position correction coefficient computation/updating technique for ultrafine pattern fabrication using variable shaped beam lithography | Tomoyuki Horiuchi, Noriaki Nakayamada, Junichi Suzuki | 2010-04-27 |
| 7605383 | Pattern writing apparatus using charged particle beam, and program-recorded readable recording medium | Tomoyuki Horiuchi | 2009-10-20 |