Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10032603 | Charged particle beam lithography apparatus and charged particle beam lithography method | Noriaki Nakayamada | 2018-07-24 |
| 9852885 | Charged particle beam writing method, and charged particle beam writing apparatus | Noriaki Nakayamada | 2017-12-26 |
| 9484185 | Charged particle beam writing apparatus, and charged particle beam writing method | Noriaki Nakayamada, Yasuo Kato | 2016-11-01 |
| 9224578 | Charged particle beam writing apparatus and method for acquiring dose modulation coefficient of charged particle beam | Noriaki Nakayamada, Yasuo Kato | 2015-12-29 |