Issued Patents All Time
Showing 26–50 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10163604 | Multiple charged particle beam apparatus | — | 2018-12-25 |
| 10074515 | Charged particle beam lithography method and charged particle beam lithography apparatus | — | 2018-09-11 |
| 10043634 | Inspection apparatus and inspection method | — | 2018-08-07 |
| 10020159 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Tomohiro Iijima, Hideo Inoue, Ryoichi Yoshikawa | 2018-07-10 |
| 9916962 | Multi charged particle beam irradiation apparatus, multi charged particle beam irradiation method, and multi charged particle beam adjustment method | Shinsuke Nishimura, Takanao Touya, Hirofumi Morita | 2018-03-13 |
| 9859096 | Inspection apparatus and inspection method | — | 2018-01-02 |
| 9748074 | Data generating apparatus, energy beam writing apparatus, and energy beam writing method | — | 2017-08-29 |
| 9691585 | Multi charged particle beam writing method, and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Ryoichi Yoshikawa | 2017-06-27 |
| 9570267 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Tomohiro Iijima, Hideo Inoue, Ryoichi Yoshikawa | 2017-02-14 |
| 9530610 | Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams | Kazuhiro Chiba, Hiroshi Matsumoto, Ryoichi Yoshikawa, Hirofumi Morita, Hirokazu Yamada +6 more | 2016-12-27 |
| 9343268 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Ryoichi Yoshikawa | 2016-05-17 |
| 9343266 | Charged particle beam pattern writing method and charged particle beam writing apparatus that corrects beam rotation utilizing a correlation table | Takanao Touya, Shuichi Tamamushi | 2016-05-17 |
| 9299535 | Multi charged particle beam writing apparatus | — | 2016-03-29 |
| 9202673 | Multi charged particle beam writing method and multi charged particle beam writing apparatus | Hiroshi Matsumoto, Tomohiro Iijima, Hideo Inoue, Ryoichi Yoshikawa | 2015-12-01 |
| 9076564 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Ryoichi Yoshikawa | 2015-07-07 |
| 8927941 | Multi charged particle beam writing apparatus and multi charged particle beam writing method with fixed voltage ratio einzel lens | Takanao Touya, Shuichi Tamamushi | 2015-01-06 |
| 8907306 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Ryoichi Yoshikawa | 2014-12-09 |
| 8884254 | Charged particle beam writing apparatus | Takanao Touya | 2014-11-11 |
| 8835868 | Multi charged particle beam writing apparatus | Takanao Touya | 2014-09-16 |
| 8791422 | Charged particle beam writing apparatus and charged particle beam writing method | Takanao Touya | 2014-07-29 |
| 8741547 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Ryoichi Yoshikawa | 2014-06-03 |
| 8710467 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Ryoichi Yoshikawa | 2014-04-29 |
| 8586951 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Ryoichi Yoshikawa | 2013-11-19 |
| 8492732 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | — | 2013-07-23 |
| 8362427 | Electron beam irradiation apparatus and electron beam drawing apparatus | Shinsuke Nishimura | 2013-01-29 |