Issued Patents All Time
Showing 51–72 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7692158 | Charged beam drawing apparatus | — | 2010-04-06 |
| 7508526 | Defect inspecting apparatus | Riki Ogawa, Toru Tojo | 2009-03-24 |
| 7388216 | Pattern writing and forming method | — | 2008-06-17 |
| 7326943 | Electron beam irradiating apparatus and irradiating method | — | 2008-02-05 |
| 7270921 | Pattern writing and forming method | — | 2007-09-18 |
| 7122809 | Charged beam writing method and writing tool | — | 2006-10-17 |
| 7002167 | Charged-particle beam writer | — | 2006-02-21 |
| 6836319 | Optical system adjusting method for energy beam apparatus | Jun Takamatsu, Hitoshi Sunaoshi, Naoharu Shimomura | 2004-12-28 |
| 6781680 | Optical system adjusting method for energy beam apparatus | Jun Takamatsu, Hitoshi Sunaoshi, Naoharu Shimomura | 2004-08-24 |
| 6642675 | Charged particle beam exposing apparatus | — | 2003-11-04 |
| 6617592 | Charged particle beam system and chamber of charged particle beam system | Jun Takamatsu, Kiyoshi Hattori, Hitoshi Sunaoshi, Naoharu Shimomura, Kiminobu Akeno | 2003-09-09 |
| 6606149 | Optical system adjusting method for energy beam apparatus | Jun Takamatsu, Hitoshi Sunaoshi, Naoharu Shimomaura | 2003-08-12 |
| 6207117 | Charged particle beam apparatus and gas supply and exhaustion method employed in the apparatus | Jun Takamatsu | 2001-03-27 |
| 6172364 | Charged particle beam irradiation apparatus | Jun Takamatsu, Naoharu Shimomura, Shusuke Yoshitake, Takayuki Abe, Masamitsu Itoh | 2001-01-09 |
| 6028317 | Charged particle beam optical element charged particle beam exposure apparatus and method of adjusting the same | Ken Murooka, Hitoshi Sunaoshi | 2000-02-22 |
| 5949076 | Charged beam applying apparatus | Kenji Ohtoshi, Jun Takamatsu, Toru Koike, Kazuyoshi Sugihara | 1999-09-07 |
| 5923034 | Pattern transfer mask, mask inspection method and a mask inspection apparatus | Ken Murooka | 1999-07-13 |
| 5850083 | Charged particle beam lithograph apparatus | Souji Koikari, Shuichi Tamamushi, Shusuke Yoshitake | 1998-12-15 |
| 5807650 | Photo mask and apparatus for repairing photo mask | Haruki Komano, Hiroko Nakamura, Satoshi Masuda, Katsuya Okumura, Yoji Ogawa | 1998-09-15 |
| 5793041 | Method for correcting astigmatism and focusing in charged particle optical lens-barrel | Shuichi Tamamushi, Kazunori Onoguchi, Hideo Wakamori | 1998-08-11 |
| 5539211 | Charged beam apparatus having cleaning function and method of cleaning charged beam apparatus | Kenji Ohtoshi, Itsuko Sakai, Yuichiro Yamazaki, Jun Takamatsu, Kazuyoshi Sugihara | 1996-07-23 |
| 4794340 | Synchrotron-type accelerator with rod-shaped damping antenna | — | 1988-12-27 |