Issued Patents All Time
Showing 26–47 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5912468 | Charged particle beam exposure system | Ryoichi Hirano, Souji Koikari, Kazuto Matsuki, Shusuke Yoshitake | 1999-06-15 |
| 5828457 | Sample inspection apparatus and sample inspection method | Mitsuo Tabata, Hisakazu Yoshino | 1998-10-27 |
| 5812259 | Method and apparatus for inspecting slight defects in a photomask pattern | Hisakazu Yoshino, Akihiko Sekine, Mitsuo Tabata | 1998-09-22 |
| 5744381 | Method of inspecting a pattern formed on a sample for a defect, and an apparatus thereof | Mitsuo Tabata, Toshiyuki Watanabe, Hideo Tsuchiya | 1998-04-28 |
| 5602645 | Pattern evaluation apparatus and a method of pattern evaluation | Mitsuo Tabata, Kiminobu Akeno, Toshiyuki Watanabe, Tomohide Watanabe, Eiji Yamanaka +2 more | 1997-02-11 |
| 5404410 | Method and system for generating a bit pattern | Hideo Tsuchiya, Kyoji Yamashita, Mitsuo Tabata, Ryoichi Yoshikawa | 1995-04-04 |
| 5379348 | Pattern defects inspection system | Toshiyuki Watanabe, Hideo Tsuchiya, Tomohide Watanabe | 1995-01-03 |
| 4984890 | Method and an apparatus for aligning first and second objects with each other | Osamu Kuwabara, Masashi Kamiya, Hisakazu Yoshino | 1991-01-15 |
| 4902133 | Method and an apparatus for aligning first and second objects with each other | Osamu Kuwabara, Masashi Kamiya, Hisakazu Yoshino | 1990-02-20 |
| 4811062 | Method for aligning first and second objects relative to each other and apparatus for practicing this method | Mitsuo Tabata, Hiroaki Shimozono | 1989-03-07 |
| 4808002 | Method and device for aligning first and second objects relative to each other | Mitsuo Tabata, Hisakazu Yoshino | 1989-02-28 |
| 4698513 | Position detector by vibrating a light beam for averaging the reflected light | Mitsuo Tabata | 1987-10-06 |
| 4578607 | Piezoelectric precise rotation mechanism for slightly rotating an object | Kazuyoshi Sugihara | 1986-03-25 |
| 4572956 | Electron beam pattern transfer system having an autofocusing mechanism | Ichiro Mori, Toshiaki Shinozaki, Kazuyoshi Sugihara, Mitsuo Tabata, Chikara Itoh | 1986-02-25 |
| 4558225 | Target body position measuring method for charged particle beam fine pattern exposure system | Mineo Gotou, Ryoichi Yoshikawa, Hirotsugu Wada | 1985-12-10 |
| 4532423 | IC Tester using an electron beam capable of easily setting a probe card unit for wafers & packaged IC's to be tested | Kazuyoshi Sugihara | 1985-07-30 |
| 4480284 | Electrostatic chuck plate | Ichiro Mori, Shunichi Sano | 1984-10-30 |
| 4469949 | Electron beam pattern transfer device and method for aligning mask and semiconductor wafer | Ichiro Mori, Kazuyoshi Sugihara, Toshiaki Shinozaki | 1984-09-04 |
| 4467210 | Electron-beam image transfer device | Kazuyoshi Sugihara, Ichiro Mori, Toshiaki Shinozaki | 1984-08-21 |
| 4455501 | Precision rotation mechanism | Kazuyoshi Sugihara | 1984-06-19 |
| 4408126 | Cassette retaining device of electron beam apparatus | Kazuyoshi Sugihara, Shuntaro Hata, Hirooki Numaga, Haruhisa Mukooyama, Yoshio Suzuki | 1983-10-04 |
| 4262974 | Linear bearing apparatus | Yoshinori Nishio | 1981-04-21 |