Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7415149 | Pattern inspection apparatus | Hideo Tsuchiya, Kyoji Yamashita, Toshiyuki Watanabe, Toru Tojo, Yasushi Sanada | 2008-08-19 |
| 7379176 | Mask defect inspection apparatus | Akihiko Sekine, Toshiyuki Watanabe, Shinji Sugihara, Riki Ogawa | 2008-05-27 |
| 7372560 | Pattern inspection apparatus | Toru Tojo, Toshiyuki Watanabe, Akihiko Sekine | 2008-05-13 |
| 7359546 | Defect inspection apparatus and defect inspection method | Shinji Sugihara, Junji Oaki, Toru Tojo | 2008-04-15 |
| 6285783 | Pattern data generating apparatus and method for inspecting defects in fine patterns in a photomask or semiconductor wafer | Hideo Tsuchiya | 2001-09-04 |