Issued Patents All Time
Showing 26–50 of 64 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10222341 | Focusing apparatus, focusing method, and pattern inspection method | Toshiaki OTAKI | 2019-03-05 |
| 10197507 | Inspection apparatus | Hiromu Inoue, Masatoshi Hirono | 2019-02-05 |
| 10192304 | Method for measuring pattern width deviation, and pattern inspection apparatus | Kazuhiko Inoue | 2019-01-29 |
| 10041892 | Charged particle beam inspection apparatus and charged particle beam inspection method | Masataka Shiratsuchi, Chosaku Noda | 2018-08-07 |
| 10036714 | Image capturing device and inspection apparatus and inspection method | — | 2018-07-31 |
| 10007980 | Inspection method and inspection apparatus | Masatoshi Hirono | 2018-06-26 |
| 9846928 | Inspection method and inspection apparatus | Masatoshi Hirono | 2017-12-19 |
| 9804103 | Inspection method, template substrate, and focus offset method | Hideo Tsuchiya | 2017-10-31 |
| 9683947 | Defect inspection device | Masatoshi Hirono, Takeshi Fujiwara | 2017-06-20 |
| 9575010 | Inspection apparatus and inspection method | Nobutaka Kikuiri, Hideaki Hashimoto | 2017-02-21 |
| 9557277 | Inspection apparatus and inspection method | Hiromu Inoue | 2017-01-31 |
| 9423356 | Illumination apparatus and inspection apparatus | Hiroyuki Nagahama, Takeshi Fujiwara | 2016-08-23 |
| 9410899 | Illumination apparatus and pattern inspection apparatus | Toshiaki OTAKI | 2016-08-09 |
| 9213001 | Focal position adjustment method and inspection method | Hiroyuki Nagahama | 2015-12-15 |
| 9207189 | Sample support apparatus | Hiromu Inoue | 2015-12-08 |
| 9194817 | Defect detection method | Shinji Sugihara, Hiromu Inoue | 2015-11-24 |
| 9157870 | Pattern test apparatus | Masatoshi Hirono | 2015-10-13 |
| 9086388 | Pattern evaluation method and apparatus | Nobutaka Kikuiri | 2015-07-21 |
| 9036143 | Inspection apparatus and inspection method | Yasuhiro Yamashita, Toshiaki OTAKI | 2015-05-19 |
| 8797525 | Pattern inspection apparatus and pattern inspection method | — | 2014-08-05 |
| 8767200 | Luminous flux branching element and mask defect inspection apparatus | Hiroyuki Nagahama, Tomohiro Nakamura | 2014-07-01 |
| 8755040 | Illuminating apparatus, pattern inspection apparatus, and method of forming illuminating light | — | 2014-06-17 |
| 8199403 | Light polarization control using serial combination of surface-segmented half wavelength plates | — | 2012-06-12 |
| 8072592 | Reticle defect inspection apparatus and reticle defect inspection method | Toshiyuki Watanabe | 2011-12-06 |
| 8049897 | Reticle defect inspection apparatus and inspection method using thereof | Ryoichi Hirano | 2011-11-01 |