Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8121387 | Mask pattern verifying method | Mitsuyo Asano, Shinji Yamaguchi, Satoshi Tanaka, Soichi Inoue, Masamitsu Itoh | 2012-02-21 |
| 8036446 | Semiconductor mask inspection using die-to-die and die-to-database comparisons | Tomohiro Tsutsui | 2011-10-11 |
| 7912275 | Method of evaluating a photo mask and method of manufacturing a semiconductor device | Hiroki Yamamoto, Masamitsu Itoh, Shoji Mimotogi, Hideki Kanai, Yukiyasu Arisawa | 2011-03-22 |
| 7742162 | Mask defect inspection data generating method, mask defect inspection method and mask production method | Tomohiro Tsutsui, Ryoji Yoshikawa | 2010-06-22 |
| 7735055 | Method of creating photo mask data, method of photo mask manufacturing, and method of manufacturing semiconductor device | Tomohiro Tsutsui | 2010-06-08 |
| 7229721 | Method for evaluating photo mask and method for manufacturing semiconductor device | Shoji Mimotogi, Shigeki Nojima | 2007-06-12 |
| 7222327 | Photo mask, method of manufacturing photo mask, and method of generating mask data | Tomohiro Tsutsui | 2007-05-22 |
| 7090949 | Method of manufacturing a photo mask and method of manufacturing a semiconductor device | Shigeki Nojima, Shoji Mimotogi, Satoshi Tanaka, Toshiya Kotani, Shigeru Hasebe +2 more | 2006-08-15 |
| 7008731 | Method of manufacturing a photomask and method of manufacturing a semiconductor device using the photomask | Shigeki Nojima | 2006-03-07 |
| 6649310 | Method of manufacturing photomask | Masamitsu Itoh, Shigeki Nojima, Shoji Mimotogi | 2003-11-18 |
| 6333213 | Method of forming photomask and method of manufacturing semiconductor device | Shigeru Hasebe, Mineo Goto | 2001-12-25 |
| 4989156 | Method of drawing a pattern on wafer with charged beam | — | 1991-01-29 |
| 4878177 | Method for drawing a desired circuit pattern using charged particle beam | Susumu Watanabe | 1989-10-31 |
| 4701053 | Mark position detecting method and apparatus | — | 1987-10-20 |
| 4623256 | Apparatus for inspecting mask used for manufacturing integrated circuits | Ryoichi Yoshikawa | 1986-11-18 |