Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8336004 | Dimension assurance of mask using plurality of types of pattern ambient environment | Shigeki Nojima, Tetsuaki Matsunawa, Masahiro Miyairi | 2012-12-18 |
| 7575835 | Exposure method, exposure quantity calculating system using the exposure method and semiconductor device manufacturing method using the exposure method | Takashi Sato, Shoji Mimotogi | 2009-08-18 |
| 7473495 | Method of creating predictive model, method of managing process steps, method of manufacturing semiconductor device, method of manufacturing photo mask, and computer program product | Satoshi Tanaka, Soichi Inoue, Koji Hashimoto | 2009-01-06 |
| 7446852 | Projection exposure mask acceptance decision system, projection exposure mask acceptance decision method, method for manufacturing semiconductor device, and computer program project | Yukiyasu Arisawa, Shoji Mimotogi | 2008-11-04 |
| 7118834 | Exposure method, exposure quantity calculating system using the exposure method and semiconductor device manufacturing method using the exposure method | Takashi Sato, Shoji Mimotogi | 2006-10-10 |
| 7090949 | Method of manufacturing a photo mask and method of manufacturing a semiconductor device | Shigeki Nojima, Shoji Mimotogi, Satoshi Tanaka, Toshiya Kotani, Koji Hashimoto +2 more | 2006-08-15 |
| 6333213 | Method of forming photomask and method of manufacturing semiconductor device | Mineo Goto, Osamu Ikenaga | 2001-12-25 |