Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11256947 | Pattern shape measuring method | — | 2022-02-22 |
| 8121387 | Mask pattern verifying method | Shinji Yamaguchi, Satoshi Tanaka, Soichi Inoue, Masamitsu Itoh, Osamu Ikenaga | 2012-02-21 |
| 7673281 | Pattern evaluation method and evaluation apparatus and pattern evaluation program | Eiji Yamanaka, Masamitsu Itoh, Shinji Yamaguchi | 2010-03-02 |
| 7313781 | Image data correction method, lithography simulation method, image data correction system, program, mask and method of manufacturing a semiconductor device | Masamitsu Itoh, Eiji Yamanaka, Shinji Yamaguchi | 2007-12-25 |
| 6335129 | Method for repairing pattern defect, photo mask using the method, and semiconductor device manufacturing method employing the photo mask | Shingo Kanamitsu | 2002-01-01 |
| 5459772 | External apparatus for monitoring a communication system | Masatoshi Kumagai | 1995-10-17 |