Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5247329 | Projection type exposure method and apparatus | Yoshitada Oshida, Toshiei Kurosaki, Akira Inagaki | 1993-09-21 |
| 5153916 | Method and apparatus for detecting focal plane | Akira Inagaki, Masataka Shiba | 1992-10-06 |