Issued Patents All Time
Showing 26–39 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5121449 | Information detecting system of scanning type | Ryuichi Funatsu, Motoya Taniguchi, Minoru Tanaka, Akira Inagaki | 1992-06-09 |
| 5070488 | Optical integrated circuit and optical apparatus | Atsuko Fukushima, Yasuo Hira, Hidemi Sato, Kazumi Kawamoto, Kenchi Ito +1 more | 1991-12-03 |
| 5008702 | Exposure method and apparatus | Tsutomu Tanaka, Yoshitada Oshida, Naoto Nakashima, Ryuichi Funatsu | 1991-04-16 |
| 4993837 | Method and apparatus for pattern detection | Yoshitada Oshida, Yasuhiro Yoshitake, Naoto Nakashima | 1991-02-19 |
| 4906852 | Projection alignment method and apparatus | Toshihiko Nakata | 1990-03-06 |
| 4819033 | Illumination apparatus for exposure | Yasuhiro Yoshitake, Yoshitada Oshida, Naoto Nakashima | 1989-04-04 |
| 4795261 | Reduction projection type aligner | Toshihiko Nakata, Yoshitada Oshida | 1989-01-03 |
| 4777374 | Pattern position detecting method and apparatus for detecting the position of an alignment direction of a wafer target pattern | Toshihiko Nakata, Yoshitada Oshida | 1988-10-11 |
| 4725737 | Alignment method and apparatus for reduction projection type aligner | Toshihiko Nakata, Yoshitada Oshida, Sachio Uto, Atsuhiro Yoshizaki | 1988-02-16 |
| 4701050 | Semiconductor exposure apparatus and alignment method therefor | Yoshitada Oshida, Naoto Nakashima, Toshihiko Nakata, Sachio Uto | 1987-10-20 |
| 4676637 | Exposure apparatus with foreign particle detector | Sachio Uto, Yoshitada Oshida | 1987-06-30 |
| 4669875 | Foreign particle detecting method and apparatus | Sachio Uto, Mitsuyoshi Koizumi | 1987-06-02 |
| 4668089 | Exposure apparatus and method of aligning exposure mask with workpiece | Yoshitada Oshida, Toshihiko Nakata, Mitsuyoshi Koizumi, Naoto Nakashima | 1987-05-26 |
| 4458302 | Reflection type optical focusing apparatus | Yoshitada Oshida | 1984-07-03 |