Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10365227 | Detection device and detection method | Tadao Kondo | 2019-07-30 |
| 7940383 | Method of detecting defects on an object | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2011-05-10 |
| 7692779 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2010-04-06 |
| 7639350 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2009-12-29 |
| 7443496 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2008-10-28 |
| 7098055 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2006-08-29 |
| 7037735 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2006-05-02 |
| 6597448 | Apparatus and method of inspecting foreign particle or defect on a sample | Hidetoshi Nishiyama, Minori Noguchi, Yoshimasa Ohshima, Tetsuya Watanabe, Takahiro Jingu +3 more | 2003-07-22 |
| 6411377 | Optical apparatus for defect and particle size inspection | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2002-06-25 |
| 6365425 | Method of manufacturing semiconductor device | Masami Ikota, Aritoshi Sugimoto | 2002-04-02 |
| 5880828 | Surface defect inspection device and shading correction method therefor | Yoshio Morishige, Tetsuya Watanabe | 1999-03-09 |
| 5818576 | Extraneous substance inspection apparatus for patterned wafer | Yoshio Morishige, Tetsuya Watanabe | 1998-10-06 |
| 5724132 | Extraneous substance inspection apparatus for patterned wafer | Yoshio Morishige, Tetsuya Watanabe | 1998-03-03 |
| 5694214 | Surface inspection method and apparatus | Tetsuya Watanabe, Yoshio Morishige | 1997-12-02 |
| 5644393 | Extraneous substance inspection method and apparatus | Tetsuya Watanabe, Yoshio Morishige | 1997-07-01 |