Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8559000 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka +4 more | 2013-10-15 |
| 8422009 | Foreign matter inspection method and foreign matter inspection apparatus | Hiroyuki Yamashita, Mamoru Kobayashi, Eiji Imai, Koichi Nagoya, Hideki Fukushima | 2013-04-16 |
| 8274651 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka +4 more | 2012-09-25 |
| 8040503 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka +4 more | 2011-10-18 |
| 7986405 | Foreign matter inspection method and foreign matter inspection apparatus | Hiroyuki Yamashita, Mamoru Kobayashi, Eiji Imai, Koichi Nagoya, Hideki Fukushima | 2011-07-26 |
| 7940383 | Method of detecting defects on an object | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2011-05-10 |
| 7719671 | Foreign matter inspection method and foreign matter inspection apparatus | Hiroyuki Yamashita, Mamoru Kobayashi, Eiji Imai, Koichi Nagoya, Hideki Fukushima | 2010-05-18 |
| 7692779 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2010-04-06 |
| 7643138 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka +4 more | 2010-01-05 |
| 7639350 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2009-12-29 |
| 7443496 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2008-10-28 |
| 7417723 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka +4 more | 2008-08-26 |
| 7098055 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2006-08-29 |
| 7061602 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka +4 more | 2006-06-13 |
| 7037735 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2006-05-02 |
| 6888959 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka +4 more | 2005-05-03 |
| 6411377 | Optical apparatus for defect and particle size inspection | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo +7 more | 2002-06-25 |
| 5880828 | Surface defect inspection device and shading correction method therefor | Hisato Nakamura, Tetsuya Watanabe | 1999-03-09 |
| 5818576 | Extraneous substance inspection apparatus for patterned wafer | Hisato Nakamura, Tetsuya Watanabe | 1998-10-06 |
| 5724132 | Extraneous substance inspection apparatus for patterned wafer | Hisato Nakamura, Tetsuya Watanabe | 1998-03-03 |
| 5694214 | Surface inspection method and apparatus | Tetsuya Watanabe, Hisato Nakamura | 1997-12-02 |
| 5644393 | Extraneous substance inspection method and apparatus | Hisato Nakamura, Tetsuya Watanabe | 1997-07-01 |