Issued Patents All Time
Showing 51–75 of 114 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7417723 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2008-08-26 |
| 7417244 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake, Yukio Kenbou +2 more | 2008-08-26 |
| 7417721 | Defect detector and defect detecting method | Sachio Uto, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu, Takahiro Jingu +2 more | 2008-08-26 |
| 7411207 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2008-08-12 |
| 7369223 | Method of apparatus for detecting particles on a specimen | Akira Hamamatsu, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno, Hiroyuki Nakano +5 more | 2008-05-06 |
| 7332359 | Semiconductor device inspection method | Akira Hamamatsu, Yoshimasa Ohshima, Hidetoshi Nishiyama | 2008-02-19 |
| 7315366 | Apparatus and method for inspecting defects | Akira Hamamatsu, Yoshimasa Ooshima, Hidetoshi Nishiyama, Tetsuya Watanabe | 2008-01-01 |
| 7315363 | Inspection method and inspection apparatus | Akira Hamamatsu, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2008-01-01 |
| 7277155 | Exposure apparatus and method | Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 2007-10-02 |
| 7271908 | Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device | Masahiko Nakada, Takahiko Suzuki, Taketo Ueno, Toshihiko Nakata, Shunji Maeda | 2007-09-18 |
| 7262425 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2007-08-28 |
| 7256412 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Yoshimasa Ooshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2007-08-14 |
| 7248352 | Method for inspecting defect and apparatus for inspecting defect | Akira Hamamatsu, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2007-07-24 |
| 7242016 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake, Yukio Kenbou +2 more | 2007-07-10 |
| 7231079 | Method and system for inspecting electronic circuit pattern | Hirohito Okuda, Yuji Takagi, Masahiro Watanabe, Shunji Maeda, Yoshimasa Ooshima +1 more | 2007-06-12 |
| 7196785 | System for monitoring foreign particles, process processing apparatus and method of electronic commerce | Hidetoshi Nishiyama, Tetsuya Watanabe, Takuaki Sekiguchi | 2007-03-27 |
| 7187438 | Apparatus and method for inspecting defects | Akira Hamamatsu, Yoshimasa Ooshima, Hidetoshi Nishiyama, Tetsuya Watanabe | 2007-03-06 |
| 7177020 | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process | Hiroshi Morioka, Yoshimasa Ohshima, Yukio Kembo, Hidetoshi Nishiyama, Kazuhiko Matsuoka +1 more | 2007-02-13 |
| 7115892 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Yoshimasa Ooshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2006-10-03 |
| 7098055 | Apparatus and method for testing defects | Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2006-08-29 |
| 7061602 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2006-06-13 |
| 7037735 | Apparatus and method for testing defects | Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2006-05-02 |
| 7012671 | Exposure apparatus and method | Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 2006-03-14 |
| 6998630 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Yoshimasa Ooshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2006-02-14 |
| 6936835 | Method and its apparatus for inspecting particles or defects of a semiconductor device | Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu, Kenji Watanabe, Tetsuya Watanabe +1 more | 2005-08-30 |