Issued Patents All Time
Showing 101–114 of 114 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5333495 | Method and apparatus for processing a minute portion of a specimen | Hiroshi Yamaguchi, Makiko Kohno, Toshihiko Nakata | 1994-08-02 |
| 5329333 | Exposure apparatus and method | Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 1994-07-12 |
| 5302999 | Illumination method, illumination apparatus and projection exposure apparatus | Yoshitada Oshida, Tutomu Tawa, Yukihiro Shibata, Shigemi Ishii, Tsuneo Terasawa +1 more | 1994-04-12 |
| 5274434 | Method and apparatus for inspecting foreign particles on real time basis in semiconductor mass production line | Hiroshi Morioka, Yoshimasa Ohshima, Yukio Kembo, Yuzo Taniguchi | 1993-12-28 |
| 5233191 | Method and apparatus of inspecting foreign matters during mass production start-up and mass production line in semiconductor production process | Yukio Kembo, Hiroshi Morioka, Hiroshi Yamaguchi, Makiko Kohno, Yoshimasa Ohshima | 1993-08-03 |
| 5214282 | Method and apparatus for processing a minute portion of a specimen | Hiroshi Yamaguchi, Makiko Kohno, Toshihiko Nakata | 1993-05-25 |
| 5098191 | Method of inspecting reticles and apparatus therefor | Hiroaki Shishido, Mitsuyoshi Koizumi, Nobuyuki Akiyama, Toshihilo Nakata | 1992-03-24 |
| RE33424 | Apparatus and method for measuring the depth of fine engraved patterns | Toru Otsubo, Susumu Aiuchi | 1990-11-06 |
| 4952058 | Method and apparatus for detecting abnormal patterns | Hiroaki Shishido, Mitsuyoshi Koizumi | 1990-08-28 |
| 4922308 | Method of and apparatus for detecting foreign substance | Mitsuyoshi Koizumi, Hiroaki Shishido, Sachio Uto, Yoshimasa Ohshima | 1990-05-01 |
| 4840487 | Measuring apparatus for etching pits | Toru Otsubo, Susumu Aiuchi | 1989-06-20 |
| 4744660 | Apparatus for measuring difference in shallow level | Toru Otsubo, Susumu Aiuchi | 1988-05-17 |
| 4615620 | Apparatus for measuring the depth of fine engraved patterns | Toru Otsubo, Susumu Aiuchi | 1986-10-07 |
| 4487678 | Dry-etching apparatus | Toru Otsubo, Susumu Aiuchi, Takashi Kamimura, Teru Fujii | 1984-12-11 |