Issued Patents All Time
Showing 26–50 of 114 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8013989 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu, Takahiro Jingu +2 more | 2011-09-06 |
| 7953567 | Defect inspection apparatus and defect inspection method | Kei Shimura, Masaaki Ito, Kenji Aiko, Shuichi Chikamatsu, Shigeo Otsuki +4 more | 2011-05-31 |
| 7952700 | Method of apparatus for detecting particles on a specimen | Akira Hamamatsu, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno, Hiroyuki Nakano +5 more | 2011-05-31 |
| 7952085 | Surface inspection apparatus and method thereof | Ichiro Ishimaru, Ichiro Moriyama, Yoshikazu Tanabe, Yasuo Yatsugake, Yukio Kenbou +2 more | 2011-05-31 |
| 7940383 | Method of detecting defects on an object | Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2011-05-10 |
| 7903244 | Method for inspecting defect and apparatus for inspecting defect | Akira Hamamatsu, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2011-03-08 |
| 7847927 | Defect inspection method and defect inspection apparatus | Shuichi Chikamatsu, Masayuki Ochi, Kenji Aiko | 2010-12-07 |
| 7817261 | Method of apparatus for detecting particles on a specimen | Akira Hamamatsu, Yoshimasa Ohshima, Sachio Uto, Taketo Ueno, Hiroyuki Nakano +5 more | 2010-10-19 |
| 7768634 | Defects inspecting apparatus and defects inspecting method | Sachio Uto, Hidetoshi Nishiyama, Yoshimasa Ohshima, Akira Hamamatsu, Takahiro Jingu +2 more | 2010-08-03 |
| 7746453 | Pattern defect inspection apparatus and method | Hidetoshi Nishiyama, Kei Shimura, Sachio Uto | 2010-06-29 |
| 7733475 | Defect inspecting apparatus | Shuichi Chikamatsu, Kenji Aiko | 2010-06-08 |
| 7733474 | Defect inspection system | Kenji Aiko, Shuichi Chikamatsu, Hisafumi Iwata | 2010-06-08 |
| 7692779 | Apparatus and method for testing defects | Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2010-04-06 |
| 7672799 | Defect inspection apparatus and defect inspection method | Kei Shimura, Masaaki Ito, Kenji Aiko, Shuichi Chikamatsu, Shigeo Otsuki +4 more | 2010-03-02 |
| 7643138 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka, Takanori Ninomiya +4 more | 2010-01-05 |
| 7643139 | Method and apparatus for detecting defects | Yoshimasa Ohshima, Hiroyuki Nakano | 2010-01-05 |
| 7639350 | Apparatus and method for testing defects | Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2009-12-29 |
| 7604925 | Exposure apparatus and method | Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 2009-10-20 |
| 7598020 | Exposure apparatus and method | Yukio Kenbo, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama | 2009-10-06 |
| 7586594 | Method for inspecting defect and apparatus for inspecting defect | Akira Hamamatsu, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2009-09-08 |
| 7586593 | Inspection method and inspection apparatus | Akira Hamamatsu, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto | 2009-09-08 |
| 7535561 | Defect inspecting apparatus | Shuichi Chikamatsu, Kenji Aiko | 2009-05-19 |
| 7511806 | Apparatus and method for inspecting defects | Akira Hamamatsu, Yoshimasa Ooshima, Hidetoshi Nishiyama, Tetsuya Watanabe | 2009-03-31 |
| 7499157 | System for monitoring foreign particles, process processing apparatus and method of electronic commerce | Hidetoshi Nishiyama, Tetsuya Watanabe, Takuaki Sekiguchi | 2009-03-03 |
| 7443496 | Apparatus and method for testing defects | Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Yukio Kembo, Ryouji Matsunaga +7 more | 2008-10-28 |