Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6506686 | Plasma processing apparatus and plasma processing method | Toshio Masuda, Kazue Takahashi, Tomoyuki Tamura | 2003-01-14 |
| 4631106 | Plasma processor | Norio Nakazato, Yutaka Kakehi, Takeshi Harada, Makoto Nawata, Hironobu Ueda +3 more | 1986-12-23 |
| 4618398 | Dry etching method | Makoto Nawata, Norio Nakazato, Masaharu Nishiumi | 1986-10-21 |