Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142489 | Semiconductor device manufacturing method and plasma processing method | Kenichi Kuwahara, Makoto Miura | 2024-11-12 |
| 11887814 | Plasma processing method | Kenichi Kuwahara, Masaaki Taniyama | 2024-01-30 |
| 9150967 | Plasma processing apparatus and sample stage | Tomoyuki Watanabe, Yutaka Ohmoto | 2015-10-06 |
| 8889024 | Plasma etching method | Tomoyuki Watanabe, Michikazu Morimoto, Tetsuo Ono | 2014-11-18 |
| 8801951 | Plasma processing method | Yoshiharu Inoue, Michikazu Morimoto, Tsuyoshi Matsumoto, Tetsuo Ono, Tadamitsu Kanekiyo +1 more | 2014-08-12 |
| 8741166 | Plasma etching method | Tomoyuki Watanabe, Michikazu Morimoto, Tetsuo Ono | 2014-06-03 |
| 8580131 | Plasma etching method | Tomoyuki Watanabe, Michikazu Morimoto, Tetsuo Ono | 2013-11-12 |
| 8282848 | Plasma processing method and plasma processing apparatus | Yutaka Ohmoto, Yutaka Kouzuma, Ken Yoshioka, Tsunehiko Tsubone | 2012-10-09 |
| 8092637 | Manufacturing method in plasma processing apparatus | Yutaka Kouzuma, Yutaka Ohmoto, Ken Yoshioka, Tsunehiko Tsubone | 2012-01-10 |
| 7122479 | Etching processing method | Yutaka Ohmoto, Ryouji Fukuyama, Michinobu Mizumura | 2006-10-17 |
| 7026252 | Etching aftertreatment method | Michinobu Mizumura, Ryouji Fukuyama, Yutaka Ohmoto, Katsuya Watanabe | 2006-04-11 |
| 7009714 | Method of dry etching a sample and dry etching system | Yutaka Ohmoto, Ryouji Fukuyama | 2006-03-07 |
| 6444087 | Plasma etching system | Makoto Nawata, Tomoyuki Tamura | 2002-09-03 |