Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7122479 | Etching processing method | Yutaka Ohmoto, Mamoru Yakushiji, Michinobu Mizumura | 2006-10-17 |
| 7026252 | Etching aftertreatment method | Michinobu Mizumura, Mamoru Yakushiji, Yutaka Ohmoto, Katsuya Watanabe | 2006-04-11 |
| 7009714 | Method of dry etching a sample and dry etching system | Yutaka Ohmoto, Mamoru Yakushiji | 2006-03-07 |