Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6850012 | Plasma processing apparatus | Manabu Edamura, Kazuyuki Ikenaga, Ken Yoshioka | 2005-02-01 |
| 5607510 | Vacuum processing apparatus | Naoyuki Tamura, Tetsunori Kaji | 1997-03-04 |
| 5458687 | Method of and apparatus for securing and cooling/heating a wafer | Hiroyuki Shichida, Naoyuki Tamura | 1995-10-17 |
| 5391260 | Vacuum processing apparatus | Naoyuki Tamura, Tetsunori Kaji | 1995-02-21 |