Issued Patents All Time
Showing 51–75 of 79 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499424 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Tsunehiko Tsubone +4 more | 2002-12-31 |
| 6492277 | Specimen surface processing method and apparatus | Tetsuo Ono, Yasuhiro Nishimori, Takashi Sato, Naoyuki Kofuji, Masaru Izawa +7 more | 2002-12-10 |
| 6491832 | Method for processing specimens | Yoshimi Torii, Moriaki Fuyama, Tomohiro Okada, Saburou Kanai, Takehito Usui +1 more | 2002-12-10 |
| 6481370 | Plasma processsing apparatus | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Tsunehiko Tsubone +4 more | 2002-11-19 |
| 6430878 | Glass guide | Takayuki Terasawa, Masahiro Nozaki | 2002-08-13 |
| 6430469 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Yoshinao Kawasaki | 2002-08-06 |
| 6413876 | Method for plasma processing high-speed semiconductor circuits with increased yield | Yutaka Ohmoto, Hironobu Kawahara, Kazue Takahashi, Saburou Kanai | 2002-07-02 |
| 6388382 | Plasma processing apparatus and method | Akira Doi, Manabu Edamura, Hideyuki Kazumi, Saburou Kanai, Tsutomu Tetsuka +3 more | 2002-05-14 |
| 6373681 | Electrostatic chuck, and method of and apparatus for processing sample using the chuck | Seiichiro Kanno, Tatehito Usui, Saburo Kanai, Youichi Itou | 2002-04-16 |
| 6329050 | Adhesive for electronic parts and adhesive tape for electronic parts | Hitoshi Narushima, Osamu Oka | 2001-12-11 |
| 6309980 | Semiconductor integrated circuit arrangement fabrication method | Takafumi Tokunaga, Sadayuki Okudaira, Tatsumi Mizutani, Kazutami Tago, Hideyuki Kazumi | 2001-10-30 |
| 6253117 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Yoshinao Kawasaki | 2001-06-26 |
| 6245202 | Plasma treatment device | Manabu Edamura, Ryoji Nishio, Saburo Kanai | 2001-06-12 |
| 6243251 | Electrostatic chuck, and method of and apparatus for processing sample using the chuck | Seiichiro Kanno, Tatehito Usui, Saburo Kanai, Youichi Itou | 2001-06-05 |
| 6188935 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Yoshinao Kawasaki | 2001-02-13 |
| 6187874 | Adhesive for electronic parts and adhesive tape for electronic parts | Hitoshi Narushima, Osamu Oka | 2001-02-13 |
| 6180019 | Plasma processing apparatus and method | Hideyuki Kazumi, Tsutomu Tetsuka, Ryoji Nishio, Masatsugu Arai, Tsunehiko Tsubone +4 more | 2001-01-30 |
| 6172321 | Method and apparatus for plasma processing apparatus | Saburou Kanai, Tetsunori Kaji, Ryoji Nishio, Manabu Edamura | 2001-01-09 |
| 6074958 | Semiconductor integrated circuit arrangement fabrication method | Takafumi Tokunaga, Sadayuki Okudaira, Tatsumi Mizutani, Kazutami Tago, Hideyuki Kazumi | 2000-06-13 |
| 6034346 | Method and apparatus for plasma processing apparatus | Saburou Kanai, Tetsunori Kaji, Ryoji Nishio, Manabu Edamura | 2000-03-07 |
| 5962347 | Semiconductor integrated circuit arrangement fabrication method | Takafumi Tokunaga, Sadayuki Okudaira, Tatsumi Mizutani, Kazutami Tago, Hideyuki Kazumi | 1999-10-05 |
| 5946184 | Electrostatic chuck, and method of and apparatus for processing sample | Seiichiro Kanno, Tatehito Usui, Saburo Kanai, Youichi Itou | 1999-08-31 |
| 5874013 | Semiconductor integrated circuit arrangement fabrication method | Takafumi Tokunaga, Sadayuki Okudaira, Tatsumi Mizutani, Kazutami Tago, Hideyuki Kazumi | 1999-02-23 |
| 5855726 | Vacuum processing apparatus and semiconductor manufacturing line using the same | Minoru Soraoka, Yoshinao Kawasaki | 1999-01-05 |
| 5502613 | Superconducting magnet abnormality detection and protection apparatus | Toshio Saitoh, Teruhiro Takizawa, Naoki Maki, Takashi Kobayashi, Masayuki Shibata +2 more | 1996-03-26 |