Issued Patents All Time
Showing 1–25 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7071114 | Method and apparatus for dry etching | Takao Kumihashi, Kazunori Tsujimoto | 2006-07-04 |
| 6927173 | Plasma processing method | Masahito Mori, Kenetsu Yokogawa | 2005-08-09 |
| 6902683 | Plasma processing apparatus and plasma processing method | Tetsunori Kaji, Toru Otsubo, Katsuya Watanabe, Katsuhiko Mitani, Junichi Tanaka | 2005-06-07 |
| 6842658 | Method of manufacturing a semiconductor device and manufacturing system | Masaru Izawa, Masahito Mori, Nobuyuki Negishi | 2005-01-11 |
| 6713401 | Method for manufacturing semiconductor device | Kenetsu Yokogawa, Yoshinori Momonoi, Kazunori Tsujimoto | 2004-03-30 |
| 6643893 | Apparatus for cleaning semiconductor wafers in a vacuum environment | Yoshinori Momonoi, Kenetsu Yokogawa, Masaru Izawa | 2003-11-11 |
| 6629538 | Method for cleaning semiconductor wafers in a vacuum environment | Kenetsu Yokogawa, Yoshinori Momonoi, Masaru Izawa | 2003-10-07 |
| 6579154 | Dry chemical-mechanical polishing method | Seiji Yamamoto, Kenetsu Yokogawa | 2003-06-17 |
| 6573190 | Dry etching device and dry etching method | Masaru Izawa, Kenetsu Yokogawa, Nobuyuki Negishi, Naoyuki Kofuji | 2003-06-03 |
| 6562722 | Method and apparatus for dry etching | Takao Kumihashi, Kazunori Tsujimoto | 2003-05-13 |
| 6551445 | Plasma processing system and method for manufacturing a semiconductor device by using the same | Ken'etsu Yokogawa, Yoshinori Momonoi, Nobuyuki Negishi, Masaru Izawa | 2003-04-22 |
| 6511608 | Plasma processing method | Masahito Mori, Kenetsu Yokogawa | 2003-01-28 |
| 6506687 | Dry etching device and method of producing semiconductor devices | Masaru Izawa | 2003-01-14 |
| 6475918 | Plasma treatment apparatus and plasma treatment method | Masaru Izawa, Kenetsu Yokogawa, Nobuyuki Negishi, Yoshinori Momonoi | 2002-11-05 |
| 6333273 | Method and apparatus for dry etching | Takao Kumihashi, Kazunori Tsujimoto | 2001-12-25 |
| 6197151 | Plasma processing apparatus and plasma processing method | Tetsunori Kaji, Toru Otsubo, Katsuya Watanabe, Katsuhiko Mitani, Junichi Tanaka | 2001-03-06 |
| 6136721 | Method and apparatus for dry etching | Takao Kumihashi, Kazunori Tsujimoto | 2000-10-24 |
| 6136214 | Plasma processing method and apparatus | Masahito Mori, Kenetsu Yokogawa | 2000-10-24 |
| 6129806 | Plasma processing apparatus and plasma processing method | Tetsunori Kaji, Toru Otsubo, Katsuya Watanabe, Katsuhiko Mitani, Junichi Tanaka | 2000-10-10 |
| 6033481 | Plasma processing apparatus | Ken'etsu Yokogawa, Tetsuo Ono, Kazunori Tsujimoto, Naoshi Itabashi, Masahito Mori +1 more | 2000-03-07 |
| 6008133 | Method and apparatus for dry etching | Takao Kumihashi, Kazunori Tsujimoto | 1999-12-28 |
| 5891252 | Plasma processing apparatus | Ken'etsu Yokogawa, Tetsuo Ono, Kazunori Tsujimoto, Naoshi Itabashi, Masahito Mori +1 more | 1999-04-06 |
| 5795832 | Method and apparatus for dry etching | Takao Kumihashi, Kazunori Tsujimoto | 1998-08-18 |
| 5736449 | Semiconductor memory device having improved isolation between electrodes, and process for fabricating the same | Hiroshi Miki, Yuzuru Ohji | 1998-04-07 |
| 5705029 | Dry etching method | Sadayuki Okudaira, Kazunori Tsujimoto | 1998-01-06 |