Issued Patents All Time
Showing 26–46 of 46 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5650038 | Method for dry etching | Takao Kumihashi, Kazunori Tsujimoto | 1997-07-22 |
| 5643473 | Dry etching method | Kazunori Tsujimoto, Sadayuki Okudaira, Kiichiro Mukai | 1997-07-01 |
| 5499207 | Semiconductor memory device having improved isolation between electrodes, and process for fabricating the same | Hiroshi Miki, Yuzuru Ohji | 1996-03-12 |
| 5474650 | Method and apparatus for dry etching | Takao Kumihashi, Kazunori Tsujimoto | 1995-12-12 |
| 5409562 | Dry-etching method and apparatus | Takao Kumihashi, Kazunori Tsujimoto | 1995-04-25 |
| 5368685 | Dry etching apparatus and method | Takao Kumihashi, Kazunori Tsujimoto | 1994-11-29 |
| 5354416 | Dry etching method | Sadayuki Okudaira, Kazunori Tsujimoto | 1994-10-11 |
| 5354418 | Method for dry etching | Takao Kumihashi, Kazunori Tsujimoto | 1994-10-11 |
| 5343353 | Semiconductor device and process of producing the same | Hiroshi Miki, Yuzuru Ohji, Keiichi Kanehori | 1994-08-30 |
| 5318667 | Method and apparatus for dry etching | Takao Kumihashi, Kazunori Tsujimoto | 1994-06-07 |
| 5242539 | Plasma treatment method and apparatus | Takao Kumihashi, Kazunori Tsujimoto, Masafumi Kanetomo, Junichi Kobayashi, Tatehito Usui +1 more | 1993-09-07 |
| 5147500 | Dry etching method | Kazunori Tsujimoto, Sadayuki Okudaira, Kiichiro Mukai | 1992-09-15 |
| 4992136 | Dry etching method | Kazunori Tsujimoto, Sadayuki Okudaira | 1991-02-12 |
| 4986877 | Method of dry etching | Kazunori Tsujimoto, Sadayuki Okudaira | 1991-01-22 |
| 4985114 | Dry etching by alternately etching and depositing | Sadayuki Okudaira, Hiroshi Kawakami, Tokuo Kure, Kazunori Tsujimoto | 1991-01-15 |
| 4956043 | Dry etching apparatus | Masafumi Kanetomo, Kazunori Tsujimoto, Kiichiro Mukai, Takahiro Daikoku, Shigekazu Kieda +2 more | 1990-09-11 |
| 4943344 | Etching method | Kazunori Tsujimoto, Sadayuki Okudaira, Kiichiro Mukai | 1990-07-24 |
| 4911812 | Plasma treating method and apparatus therefor | Katsuyoshi Kudo, Yoshinao Kawasaki, Minolu Soraoka, Tsunehiko Tsubone, Kazunori Tsujimoto +1 more | 1990-03-27 |
| 4857137 | Process for surface treatment | Sadayuki Okudaira, Kazunori Tsujimoto, Kiichiro Mukai | 1989-08-15 |
| 4529476 | Gas for selectively etching silicon nitride and process for selectively etching silicon nitride with the gas | Yoshifumi Kawamoto, Hiroshi Kawakami, Tokuo Kure, Norikazu Hashimoto, Tsuyoshi Takaichi | 1985-07-16 |
| 4406733 | Dry etching method | — | 1983-09-27 |