Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6514425 | Dry etching gas | Akira Sekiya, Tetsuya Takagaki, Shinsuke Morikawa, Shunichi Yamashita, Yasuo Hibino +3 more | 2003-02-04 |
| 4529476 | Gas for selectively etching silicon nitride and process for selectively etching silicon nitride with the gas | Yoshifumi Kawamoto, Hiroshi Kawakami, Tokuo Kure, Shinichi Tachi, Norikazu Hashimoto | 1985-07-16 |