Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6514425 | Dry etching gas | Akira Sekiya, Shinsuke Morikawa, Shunichi Yamashita, Tsuyoshi Takaichi, Yasuo Hibino +3 more | 2003-02-04 |
| 6383403 | Dry etching method | Akira Sekiya, Toshiro Yamada, Kuniaki Goto | 2002-05-07 |
| 6322715 | Gas composition for dry etching and process of dry etching | Akira Sekiya, Toshiro Yamada, Kuniaki Goto | 2001-11-27 |
| 5001327 | Apparatus and method for performing heat treatment on semiconductor wafers | Shigeki Hirasawa, Takuji Torii, Tomoji Watanabe, Toshihiro Komatsu, Kazuo Honma +3 more | 1991-03-19 |
| 4468195 | Thermal treatment apparatus | Tamotsu Sasaki, Kenichi Ikeda | 1984-08-28 |
| 4282825 | Surface treatment device | Hiroto Nagatomo, Hisao Seki, Shirou Terasaki, Hitoshi Horimuki | 1981-08-11 |