Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8513458 | Process for production of carbonyl fluoride | Heng-dao Quan, Masanori Tamura | 2013-08-20 |
| 8277560 | CVD apparatus and method of cleaning the CVD apparatus | Katsuo Sakai, Seiji Okura, Masaji Sakamura, Kaoru Abe, Hitoshi Murata +5 more | 2012-10-02 |
| 8043438 | Device for cleaning CVD device and method of cleaning CVD device | Katsuo Sakai, Kaoru Abe, Seiji Okura, Masaji Sakamura, Hitoshi Murata +2 more | 2011-10-25 |
| 7332628 | Process for producing carbonyl fluoride | Yuki Mitsui, Taisuke Yonemura, Yutaka Ohira | 2008-02-19 |
| 7326279 | Method for removing harmful substance in vent gas | Yasuo Nakazawa, Moriyuki Fukushima, Kensuke Suda | 2008-02-05 |
| 7322368 | Plasma cleaning gas and plasma cleaning method | Yuki Mitsui, Yutaka Ohira, Taisuke Yonemura | 2008-01-29 |
| 7247289 | Porous aluminum fluoride | Hengdao Quan, Masanori Tamura | 2007-07-24 |
| 7138364 | Cleaning gas and etching gas | Yutaka Ohira, Yuki Mitsui, Taisuke Yonemura | 2006-11-21 |
| 6787053 | Cleaning gases and etching gases | Yuki Mitsui, Ginjiro Tomizawa, Katsuya Fukae, Yutaka Ohira, Taisuke Yonemura | 2004-09-07 |
| 6514425 | Dry etching gas | Tetsuya Takagaki, Shinsuke Morikawa, Shunichi Yamashita, Tsuyoshi Takaichi, Yasuo Hibino +3 more | 2003-02-04 |
| 6403846 | Fluorinated, saturated hydrocarbons | Toshirou Yamada, Takashi Uruma, Tatsuya Sugimoto | 2002-06-11 |
| 6383403 | Dry etching method | Toshiro Yamada, Kuniaki Goto, Tetsuya Takagaki | 2002-05-07 |
| 6322715 | Gas composition for dry etching and process of dry etching | Toshiro Yamada, Kuniaki Goto, Tetsuya Takagaki | 2001-11-27 |
| 6211420 | Process for the preparation of fluorinated olefin | Toshiro Yamada, Mitsuru Sugawara | 2001-04-03 |
| 5847243 | Process for producing fluorinated alkene and fluorinated alkane | Toshiro Yamada, Kazunori Watanabe | 1998-12-08 |
| 5302764 | Process for preparing trifluorohydrocarbon compound | Shigeru Kurosawa, Toshiro Yamada, Kuniaki Goto | 1994-04-12 |
| 5071915 | Fluorine-containing polymeric compound and a method for the preparation thereof | Masanori Tamura, Hiroyasu Ishida | 1991-12-10 |
| 5001198 | Fluorine-containing polymeric compound and a method for the preparation thereof | Masanori Tamura, Hiroyasu Ishida | 1991-03-19 |
| 4997886 | Fluorine-containing polymeric compound and method for the preparation thereof | Masanori Tamura | 1991-03-05 |
| 4822860 | Fluorine-containing polymeric amine-amide compound and a method for the preparation thereof | — | 1989-04-18 |