Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8277560 | CVD apparatus and method of cleaning the CVD apparatus | Katsuo Sakai, Seiji Okura, Kaoru Abe, Hitoshi Murata, Etsuo Wani +5 more | 2012-10-02 |
| 8043438 | Device for cleaning CVD device and method of cleaning CVD device | Katsuo Sakai, Kaoru Abe, Seiji Okura, Hitoshi Murata, Kenji Kameda +2 more | 2011-10-25 |
| 6274489 | Manufacturing method of semiconductor apparatus | Masahiro Ono, Toshiharu Matsuda | 2001-08-14 |
| 5792695 | Manufacturing method of a semiconductor eprom device | Masahiro Ono, Toshiharu Matsuda | 1998-08-11 |