Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8277560 | CVD apparatus and method of cleaning the CVD apparatus | Katsuo Sakai, Seiji Okura, Masaji Sakamura, Kaoru Abe, Hitoshi Murata +5 more | 2012-10-02 |
| 8043438 | Device for cleaning CVD device and method of cleaning CVD device | Katsuo Sakai, Kaoru Abe, Seiji Okura, Masaji Sakamura, Hitoshi Murata +2 more | 2011-10-25 |
| 6935351 | Method of cleaning CVD device and cleaning device therefor | Koji Shibata, Naoto Tsuji, Hitoshi Murata, Yoshihide Kosano | 2005-08-30 |
| 5087341 | Dry etching apparatus and method | Tsutomu Tsukada, Koki Yasuda | 1992-02-11 |
| 4482419 | Dry etching apparatus comprising etching chambers of different etching rate distributions | Tsutomu Tsukada, Katsumi Ukai, Teruo Saitoh | 1984-11-13 |