Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11686649 | Early sign detection device and early sign detection method | Tomohito Nakamori, Keisuke Matsuyama | 2023-06-27 |
| 8277560 | CVD apparatus and method of cleaning the CVD apparatus | Katsuo Sakai, Seiji Okura, Masaji Sakamura, Kaoru Abe, Hitoshi Murata +5 more | 2012-10-02 |
| 7371898 | Methods for producing carbonyl fluoride and apparatus for production | — | 2008-05-13 |
| 7332628 | Process for producing carbonyl fluoride | Taisuke Yonemura, Yutaka Ohira, Akira Sekiya | 2008-02-19 |
| 7322368 | Plasma cleaning gas and plasma cleaning method | Akira Sekiya, Yutaka Ohira, Taisuke Yonemura | 2008-01-29 |
| 7138364 | Cleaning gas and etching gas | Yutaka Ohira, Taisuke Yonemura, Akira Sekiya | 2006-11-21 |
| 6787053 | Cleaning gases and etching gases | Akira Sekiya, Ginjiro Tomizawa, Katsuya Fukae, Yutaka Ohira, Taisuke Yonemura | 2004-09-07 |