Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11814726 | Dry etching method or dry cleaning method | Yoshinao Takahashi, Korehito KATO | 2023-11-14 |
| 11584989 | Dry etching method or dry cleaning method | Yoshinao Takahashi, Korehito KATO | 2023-02-21 |
| 11183393 | Atomic layer etching using acid halide | Korehito KATO, Yoshinao Takahashi | 2021-11-23 |
| 7919141 | Processes and equipments for preparing F2-containing gases, as well as process and equipments for modifying the surfaces of articles | Takashi Tanioka, Taisuke Yonemura | 2011-04-05 |
| 6787053 | Cleaning gases and etching gases | Akira Sekiya, Yuki Mitsui, Ginjiro Tomizawa, Yutaka Ohira, Taisuke Yonemura | 2004-09-07 |