Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12030745 | Elevator device | Takehiro Kato, Yasuo Watanabe, Taiki Morikura | 2024-07-09 |
| 11814726 | Dry etching method or dry cleaning method | Katsuya Fukae, Korehito KATO | 2023-11-14 |
| 11584989 | Dry etching method or dry cleaning method | Katsuya Fukae, Korehito KATO | 2023-02-21 |
| 11434565 | Cleaning method of semiconductor manufacturing device | Korehito KATO | 2022-09-06 |
| 11315797 | Plasma etching method using gas molecule containing sulfur atom | Korehito KATO, Mitsuharu SHIMODA, Yoshihiko Iketani | 2022-04-26 |
| 11183393 | Atomic layer etching using acid halide | Korehito KATO, Katsuya Fukae | 2021-11-23 |
| 10899615 | Feeding process of chlorine fluoride | Korehito KATO, Yoshimasa SAKURAI, Hiroki Takizawa, Sho Kikuchi, Shinichi Kawaguchi +2 more | 2021-01-26 |
| 10629449 | Gas composition for dry etching and dry etching method | Korehito KATO, Tetsuya FUKASAWA, Yoshihiko Iketani | 2020-04-21 |
| 10431472 | Gas composition for dry etching and dry etching method | Korehito KATO, Tetsuya FUKASAWA, Yoshihiko Iketani | 2019-10-01 |
| 10287499 | Etching gas composition for silicon compound, and etching method | Korehito KATO | 2019-05-14 |
| 9676596 | Elevator refurbishing method | Kazuhiro Yoshikawa, Hideki Miyahara, Kazuhiro Sasaki | 2017-06-13 |
| 6258450 | Dielectric ceramic composition and ceramic electronic parts | Nobuhiro Sasaki, Katsuyuki Horie | 2001-07-10 |